Semiconductor Market Know-How

ERIKS has been a leading supplier to the semiconductor market for over 30 years.

The semiconductor fabrication market demands chemically resistant, high temperature, high vacuum, plasma resistant, and extremely low-contamination sealing products. ERIKS has many alternatives to economic and performance-driven requirements.

From demanding OEM applications to fast-paced, broad coverage wafer fabrication opportunities – ERIKS is there to meet the challenge with unsurpassed technical expertise and product range.

Applications

	Applications	Materials
	Epi SiGe LPCVD Oxidation Diffusion RTP	FKM FFKM PTFE PEEK
	PVD MoCVD ALD	FKM FFKM PEEK PEI
	PECVD Etch (Metal, Poly, Dielectric) Ashing	FKM FFKM PEEK PTFE
	RCA Clean Wet Etch Stripping Litho/Track CMP ECD	FKM FFKM EPDM FEPM PEEK PTFE PPS

Products

• 
  custom molded elastomers
• 
  flange gaskets
• 
  o-rings
• 
  spring energized seals
• 
  engineered plastics
• 
  high vacuum compnents
• 
  vacuum greases and lubricants

Services

• 
  application support
• 
  design & develop
• 
  test & analysis
• 
  logistics